Thin Film Growth Facilities

Facility Contact
CVD set-up (indigenously built)satyam[at]iopb[dot]res[dot]in
HV thin film deposition unit (Hind Hivac-make)
UHV e-beam evaporation (Telemark-make 2×5.5 KW guns integrated with Excel Instruments-make UHV chamber)tsom[at]iopb[dot]res[dot]in
DC/RF magnetron sputtering (Excel Instruments-make coupled with Advanced Energy-make pulsed DC and RF power supplies)tsom[at]iopb[dot]res[dot]in
Molecular Beam Epitaxy (MBE) with RHEED, STM, 3 Knudsen Cells for evaporation of Ge, Au and Ag; e-beam evaporator (Omicron GmbH-make)satyam[at]iopb[dot]res[dot]in
Low Energy Cluster Beam deposition (LECBD) machine (indigenously built)