SEM (Carl Zeiss , Neon 40)

Resolution : 1.1nm @ 20 kv , 2.5nm @1kv

Probe current : 4pA - 20nA

Accelerating Voltage : 0.1 - 30kv

FIB (Orsay Physics)

Resolution :7nm @ 30kv (maximum ) ,5nm

Probe current : 1pA - 50nA

Accelerating Voltage : 2 - 30 kv

Seven Aperture positions : 10 um , 20 um, 2x50 um, 100 um, 200 um, 400 um .

Vacum System

Ion getter pump , Turbo molecular pump with oil free Rotary pump

Specimen Stage

6-axes fully Eucentric , all motorised

X= 100mm , Y= 100mm , Z=43mm ,

Z'=10mm

Tilt = -10 to – 60 deg. motorised ,

Rotation = 360 deg. continious motorised

Detectors

STEM detector , Four Quadrant Back scattered electron detector (Carl Zeiss ) &

EDS detector (INCA, Oxford)

Gas injection system (GIS, Orsay Physics)

For 5 Gases (Xenon Difluoride, Tungsten, Platinum, water, SiO2)

Micromanipulator (Kleindiek)

For TEM lamella Preparation