Item No. 2 (Contact Persons: Dr. T. Som, Mr. S.K. Choudhury)
UHV evaporation chamber & accessories
Details:
1) Fig. No. 1: Section view from Top
Flanges: Ports 1 and 4: DN 200CFF (for e-beam guns)
Flanges: Port 2: Rotatable DN 200CFF (for connecting elbow to TSP)
Flanges: Ports 3 and 5: DN 150CFF (for view ports)
Flanges: Ports 6 and 7: DN 40 CFF (blanked off)
Flanges: Port 8: DN 250 CFF (for TMP)
2) Fig. No. 2: Side view
Flanges: Ports 9,10,13,14,15,17 and 18: DN 40 CFF (blanked off)
Flanges: Ports 12, 19 DN 100CFF
Flange: Port 20: DN 150CFF
Flanges: Ports 11 and 11a: DN 100CFF (for view port)
Flanges: Port 16: DN 250 CFF (substrate holder port)
Flanges: Port 21: DN CF 150 CFF (for TSP)
Flanges: Port 12a: DN CF 40 CFF (for view port)
4″ Adaptor: DN150CFF to DN100CFF (2 nos.) with rotatable flange (DN100 CFF flange should be the rotatable one)
Chamber: 18″ dia. SS304 compatible to 10-10 - 10-11 mbar
Table: Sturdy table with adjustable legs for mounting the chamber and turbo pump.
This table should have a supporting bar/rod for the flange of Port 19.
A small table for supporting the TSP (with adjustable legs)
Accessories required:
1) View ports: glass to metal view port DN 150 CFF 2 nos. These view ports should have UHV movable shutters to prevent unwanted deposition on these view ports.
2) View ports: glass to metal view port DN 100 CFF 2 nos.
3) View ports: glass to metal view port DN 40 CFF 1 no.
4) Manual Sample insertion and removal arrangement through load lock.
5) Port 16 (DN250 CFF): 3″ dia UHV compatible Heater (max temp. 6000C with a uniformity of 50C) to be mounted from this port. This heater is to be moved in-situ using edge welded bellows (for UHV). The distance to be moved is 150 mm to 500 mm from the center of the 18″ dia chamber. Embedded K-type thermocouple for accurate temperature measurements needs to be provided. Wires for heater power as well as thermocouple should not to be exposed to vacuum. Same flanges to carry shutter for the heater. Shutter to be placed at a distance of 160 mm from the center of the chamber. Shutter to be fitted with bellow sealed rotation feed through. Metal to ceramic feedthrough with 4 leads (current 3 A, voltage 500 V) 2 nos. to be mounted on this flange.
6) In addition to item no 5, LN2 cooled substrate holder (3″ dia) to be provided on a DN 250CFF flange (port no 16). This is to be moved in-situ using edge welded bellows (for UHV). The distance to be moved is 150 mm to 500 mm from the center of the 18″ dia chamber. Same flange to carry shutter for the heater. Shutter to be at a distance of 160mm from the center of the chamber. Shutter to be fitted with bellow sealed rotation feed through. Metal to ceramic feedthrough with 4 leads (current 3 A, voltage 500 V) (2 nos.) to be mounted on this flange. Arrangement to load the sample holder in-situ to be made on the LN2 holder. The LN2 holder should have a pipe in which LN2 can be poured externally to cool the sample. For this the special SS funnel (with hole) should also be provided.
Both the low- and high-temperature substrate holders through a single bellow will be preferred.
7) Sample holder: 2″ dia silver disc (5 mm thick) embedded in SS rectangular plate. This SS rectangular plate should have arrangement to clip hold the samples (at least 10 nos.). Arrangement to load/unload this sample holder through load lock.
8) Load lock chamber (Tee): to be provided with gas valve for venting the load lock with inert gas.
9) Suitable temperature controller for the heater with Eurotherm programmable PID controller and SCR firing circuit to be provided, which can be interfaced.
10) Magnetic Shielding between 2 e-beam guns to be provided (please see the additional information provided along with the write-up in Fig. No. 3).
11) System to be He leak tested to 10-10 Torr lit /sec.
12) The chamber needs to be externally water cooled.
13) Backing tape along with programmable controller/power supply and its sensor needs to be supplied.
Please note that in order to have two or more sources installed next to each other (as in our case), it is necessary to provide a magnetic shielding between the sources. The magnetic shield is usually a sandwich alternating between magnetic and non-magnetic metal with an air gap between each piece (as shown above in the form of the "shunt"). It should extend one inch beyond all areas of the source (as mentioned above). Magnetic metals used are Mew metal or a mild steel 0.02 to 0.03 inch (0.50 to 0.75 mm). Non-magnetic metals being non-magnetic stainless steel or copper 0.02 to 0.030 inch thick. One way of mounting the shunt to the magnet arms is with 304 SS straps as shown above.
Automation:
The Temperature controller for the heater, the movement of the heater (up and down), the shutter and the thickness monitor need to be controlled by Windows based software (PC will be provided by the user).
However, semi-automated (motorized movements) operation should also be quoted.
Note: All the gate valves and gaskets will be provided by the user
System integration and demonstration of the automation to be demonstrated by the vendor.
Item No. 3 (Contact Persons: Dr. T. Som, Mr. S.K. Choudhury)
Details:
Adaptors: DN250CF to DN150CF, DN200CF to DN150CF, DN150CF to DN100CF, DN150CF to 100NEC, DN150CF to DN63CF, DN150CF to DN40CF, DN150CF to ISO 25KF, DN100CF to 100NEC, 100NEC to DN63 CF, DN100CF to DN63CF, DN40 CF to DN16 CF, DN100CF to 63NEC, DN100CF to DN40CF, DN100CF to ISO40KF, DN100CF to ISO25KF (each one in no.)
DN63CF to DN40CF, DN63CF to ISO40KF, DN63CF to ISO25KF, DN40CF to ISO25KF, ISO 40KF to ISO25KF, ISO25KF to ISO16KF(each two in nos.)
Please note that for all the adaptors the smaller flange should be a rotatable one and the length of all the adaptors should be 6″.
Three way ISO40,25,16KF, three way ISO 25,25,25KF, three way ISO25,25,16KF, and three way ISO25,16,16KF (each two in nos.).
Copper gaskets: 250 CF, 200 CF (20 nos. each); 160/150 CF, 100 CF, 63 CF, 40/35 CF, 16 CF (50 nos. each)
Neoprene gaskets: 250 CF, 200 CF, 160/150 CF, 100 CF, 63 CF, 40/35 CF, 16 CF (10 nos. each)
Neoprene rope: 9 mm dia, 6 mm dia, 5 mm dia, 4 mm dia, 3 mm dia, 2 mm dia, 1.5 mm dia, and 1 mm dia. (10 metres each)
Item No. 4 (Contact Persons: Dr. T. Som, Mr. S.K. Choudhury, Mr. A.K. Behera)
Turbo Molecular pumping system along with isolation valve and other accessories
Quantity required: 2 Sets
Details: Turbo molecular pump (Flange: Inlet-DN150 CF-F, Outlet- 25KF) of capacity-500 liters/sec (input voltage- 230 VAC, 50 Hz), pneumatic UHV isolation valve (with mounting flange of DN150 CF-F), TMP controller, bakable full range gauge heads (compatible to DN 40 CF-F), cables (10 metre long), vent valve, gaskets, flexible hose, oil mist separator, couplings, nuts & bolts/studs and other accessories. It is to be noted that we require one oil-based rotary pump (capacity 10 m3/h) for one of the turbo molecular pumping systems and one two-stage dry / extra-dry pump of suitable capacity (with ultimate vacuum in the range of 10-2 mbar or better for backing the other set of turbo molecular pumping system. Please note that we also require oil reservoirs for turbo molecular pumps having the capacity of 500 lit/sec. (10 in Nos.). All manuals (including interface related items) should be in English.
Item No. 5 (Contact Persons: Dr. T. Som, Mr. S.K. Choudhury)
Full range gauge head and controller
Quantity required: 2 Sets
Details: Full range gauge heads should be bakable and have DN40 CF-F mounting flange with mounting nuts & bolts and gaskets along with connecting cable (10 metres or above long and six in nos.). Please note that out of the two full range gauge controllers, one should be compatible to two inputs and the other should be compatible to six inputs and both should be compatible to 230 VAC, single phase, 50 Hz. All manuals should be in English.
Item No. 6 (Contact Persons: Dr. T. Som, Mr. S.K. Choudhury)
Quantity required: 1 No.
Details: Two-stage dry pump (input voltage- 415 VAC, 3-phase, 50 Hz) with inlet / outlet flanges- 40 KF having the pumping speed of 50 m3/h or better with an ultimate vacuum in the range of 10-2- 10-3 mbar and other accessories like exhaust hose. Manual should be in English.
Item No. 7 (Contact Persons: Dr. T. Som, Mr. S.K. Choudhury)
Quantity required: 2 Sets
Details: Air cooled (input 230 VAC, single phase, 50 Hz) chiller unit having SS storage tank and suitable compressor capacity and water flow rate of 25 lit./min and 35 lit./min. The chillers should be able to provide chilled water at a constant temperature of 120C. The SS recirculating pump with all SS isolation valves would be needed. Among the accessories suitable flowmeter, pressure indicator, and temperature indicators should be quoted with proper individual fittings/accessories. These controllers/indicators should be all of digital type.
Item No. 8 (Contact Persons: Dr. T. Som, Mr. S.K. Choudhury)
Quantity required: 1 No.
Details: Internal working zone should be 48-50″x24-26″x30-32″ having steel work surface. Activated carbon filter along with optional acid, halogen compounds, mercury compounds, sulphur compounds, and ammonia filters and washable pre-filter would be necessary. Microprocessor based control system, digital display for input air velocity with suitable alarm system, auto-purging system along with outlets for air/water/gas within the working area should be available. There should also be the option for monitoring the concentration of different chemicals in the working area. The back wall of the fume cabinet should be transparent and side walls should all be of glass and as an accessory, support stand with castor wheels would be required. The system and all accessories should be compatible to 230VAC, 50 Hz, single phase.
Quantity required: 1 No.
Details: Variable frequency ultrasonic cleaner for cleaning samples. The unit should be compatible to 230 VAC, 50 Hz, single phase. Any available accessory(ies) should be quoted.
Item No. 10 (Contact Persons: Dr. T. Som, Mr. S.K. Choudhury)
Gas Cylinders & Regulators:
Details: Nitrogen
(Industrial grade and XL grade) and Argon (Industrial) gas cylinders regulators
for N2 Argon will be required. All the gas cylinders should have a
capacity of
~ 7 m3. Gas regulators for helium, nitrogen, oxygen, and argon gas
cylinders will be requiring. Double stage, SS regulators capable of pressure
regulation in the range of 0 to 7 Kg/cm2 will be needed.
Item No. 13 (Contact Persons: Prof. D.P. Mahapatra/ Dr. T. Som/ Mr. S.K. Choudhury/ Mr. A.K. Behera)
Quantity required: 3 Nos.
Item No. 15 (Contact Persons: Dr. G.V. Ravi Prasad, Mr. A.K. Behera)
Theodolite
Quantity required: 1 No.
Details: Laser based reflectorless auto focus total station with software & stand having prism range: 3000-5000 metres, distance without reflector: 150-200 metres, distance accuracy: +/- 2mm -+/- 5mm, angle accuracy: 2″ & 5″ and the least count: 0.1 mm
Item No. 16 (Contact Persons: Dr. G.V. Ravi Prasad, Mr. A.K. Behera)
Turbo Molecular pumping station
Quantity required: 1 Set
Details: Turbo pumping station having the capacity of 210 liters/sec (input voltage- 230 VAC, 50 Hz) including necessary accessories, backing pump, vacuum gauges with frame mounted on castor wheels. Please note that the flange for inlet should be DN100 CF-F and that of the outlet should be 25 KF.
Item No. 17 (Contact Persons: Dr. G.V. Ravi Prasad, Mr. A.K. Behera)
Ion Pump
Quantity required: 1 Set
Details: Double ended ion pump (capacity -120 Liters/sec) with input voltage-230 VAC, 50 Hz, controller and pumping elements with flanges- DN150CF-F (8″ OD).